Assignment of Assignor's Interest

Recorded: 2004-11-04 Pages: 2

Assignor

SUPERCRITICAL SYSTEMS, INC.

Executed: 2004-10-27

Assignee

TOKYO ELECTRON LIMITED

3-6 AKASAKA 5-CHOME, MINATU-KU, TOKYO, 107-848, JAPAN

Covered Property (1)

Pump Design for Circulating Supercritical Carbon Dioxide

Patent: 6,986,647 →

Application: 10/718,964 →

Publication: US 2005/0112003

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.