IP Library › Granted Patent US 6,986,647
Granted Patent B2
US 6,986,647 · App. 10/718,964 · Granted Jan 17, 2006

Pump design for circulating supercritical carbon dioxide

Assignee: Tokyo Electron Limited
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Quick Facts
Patent No.
US 6,986,647
App. No.
10/718,964
Granted
Jan 17, 2006
Kind
B2
Abstract

In accordance with an embodiment of the present invention, a pump assembly for circulating a supercritical fluid is disclosed. The pump assembly comprises an impeller for pumping fluid between a pump inlet and a pump outlet; a rotating pump shaft coupled to the impeller, wherein the pump shaft is supported by corrosion resistant bearings; a rotor of a DC motor potted in epoxy and encased in a non-magnetic material sleeve; and a stator sealed from the fluid via a polymer sleeve. The pump can be of centrifugal type. The bearings can be made of silicon nitride balls combined with bearing races made of Cronidur® and can operate without oil or grease lubrication. The polymer sleeve can be a PEEK™ sleeve which forms a casing for the stator. The non-magnetic material sleeve encasing the rotor of the DC motor is preferably made of stainless steel. A portion of the fluid passing through the pump assembly can be diverted over the bearings and/or the rotor and stator.

Claims (13)

1. A pump assembly for circulating a supercritical fluid, comprising: an impeller for pumping fluid between a pump inlet and a pump outlet; a rotating pump shaft coupled to the impeller, wherein the pump shaft is supported by non-lubricated bearings; a rotor of a DC motor potted in epoxy and encased in a stainless steel sleeve, the stainless steel sleeve being welded to the pump shaft such that torque is transferred through the stainless steel sleeve; and a stator sealed from the fluid via a Polyetheretherketone sleeve, the rotor and the stator defining an alternative flow path used to divert a portion of the supercritical fluid through the pump assembly and then back to the pump inlet through an outer flow path.

2. The pump assembly of claim 1 , further including an electrical controller suitable for operating the pump assembly, wherein the electrical controller comprises a commutation controller for sequentially energizing windings of the stator.

3. The pump assembly of claim 1 , wherein the pump is of centrifugal type.

4. The pump assembly of claim 1 , wherein the impeller has a diameter between 1 inch and 2 inches.

5. The pump assembly of claim 1 , wherein the rotor has a diameter between 1.5 inches and 2 inches.

6. The pump assembly of claim 1 , wherein the rotor has a maximum speed of 60,000 rpm.

7. The pump assembly of claim 1 , wherein an operating pressure of the pump assembly is in the range 1,500–3,000 psi.

8. The pump assembly of claim 1 , wherein the supercritical fluid operates in the range 40–100 degrees Celsius.

9. The pump assembly of claim 1 , wherein the supercritical fluid is supercritical carbon dioxide.

10. The pump assembly of claim 1 , wherein the supercritical fluid is supercritical carbon dioxide admixed with an additive or solvent.

11. The pump assembly of claim 1 , wherein the bearings are selected from the group consisting of ceramic bearings, hybrid bearings, full complement bearings, foil journal bearings and magnetic bearings.

12. The pump assembly of claim 1 , wherein the motor is a variable speed motor.

13. The pump assembly of claim 1 , wherein the motor is an induction motor.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 4, 2004
From: SUPERCRITICAL SYSTEMS, INC.
To: TOKYO ELECTRON LIMITED
Reel/Frame 015952/0022 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 21, 2003
From: JONES, WILLIAM DALE; SEEGERS, BRYAN J.; SPILSBURY, HUGH GYBBON
To: SUPERCRITICAL SYSTEMS, INC.
Reel/Frame 014736/0902 →
Continuity (1)
Related Publication 20050112003A1 · May 26, 2005