Patent Assignment
Reel/Frame 015982/0453
Assignment of Assignor's Interest
Recorded: 2004-11-08
Pages: 3
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Dose uniformity during scanned ion implantation
Application:
10/983,461 →
Publication:
US 2006/0097196
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.