Patent Assignment
Reel/Frame 015983/0427
Assignment of Assignor's Interest
Recorded: 2004-11-08
Pages: 4
Assignor
LIN, KUO-CHIN
Executed: 2004-10-04
Assignee
MKS INSTRUMENTS, INC.
SIX SHATTUCK ROAD, ANDOVER, MASSACHUSETTS, 01810-2449
Covered Property
(1)
Multivariate control of semiconductor processes
Application:
60/611,136 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.