IP Library › Patent Application 60611136
Patent Application Provisional
App. No. 60/611,136 · Confirmation No. 3544

Multivariate control of semiconductor processes

Inventor: Kuo-Chin Lin
Provisional Application Expired
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 Code Description Pages PDF
2004-09-17 TRNA Transmittal of New Application 1 View
2004-09-17 SPEC Specification 1 View
2004-09-17 CLM Claims 3 View
2004-09-17 WFEE Fee Worksheet (SB06) 1 View
2004-09-17 ADS Application Data Sheet 2 View
2004-09-17 APPENDIX Appendix to the specification 30 View
2004-09-17 APPENDIX Appendix to the specification 11 View
2004-09-17 APPENDIX Appendix to the specification 31 View
2004-09-17 APPENDIX Appendix to the specification 6 View
2004-09-17 APPENDIX Appendix to the specification 26 View
2004-09-17 APPENDIX Appendix to the specification 17 View
2004-09-17 APPENDIX Appendix to the specification 17 View
2004-09-17 APPENDIX Appendix to the specification 12 View
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Quick Facts
App. No.
60/611,136
Filed
2004-09-17