Patent Assignment
Reel/Frame 016048/0273
Assignment of Assignor's Interest
Recorded: 2004-12-06
Pages: 2
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Apparatus for Polarization-Specific Examination, Optical Imaging System, and Calibration Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.