Patent Assignment
Reel/Frame 016085/0873
Assignment of Assignor's Interest
Recorded: 2004-12-20
Pages: 3
Assignors
PARK, SEAN
Executed: 2004-12-03
CHEN, JANG FUNG
Executed: 2004-12-03
LIEBCHEN, ARMIN
Executed: 2004-12-07
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, VELDHOVEN, AH 5500, NETHERLANDS
Covered Property
(1)
Method of Performing Resist Process Calibration/Optimization and Doe Optimization for Providing Ope Matching Between Different Lithography Systems
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.