Patent Assignment
Reel/Frame 016086/0527
Assignment of Assignor's Interest
Recorded: 2004-12-17
Pages: 3
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE,, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Ion Implantation Method and Method for Manufacturing Semiconductor Device