Patent Assignment
Reel/Frame 016090/0994
Assignment of Assignor's Interest
Recorded: 2004-12-21
Pages: 3
Assignors
HSU, MICHAEL
Executed: 2004-06-22
HSU, STEPHEN
Executed: 2004-06-22
LAIDIG, THOMAS
Executed: 2004-06-23
VAN DEN BROEKE, DOUGLAS
Executed: 2004-06-23
CHEN, JANG FUNG
Executed: 2004-06-22
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, 5500 AH VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method for Improved Lithographic Patterning Utilizing Multiple Coherency Optimized Exposures and High Transmission Attenuated Psm
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.