Patent Assignment
Reel/Frame 016094/0689
Assignment of Assignor's Interest
Recorded: 2004-12-20
Pages: 4
Assignors
DEN BOEF, ARIE JEFFREY
Executed: 2004-12-17
DUSA, MIRCEA
Executed: 2004-12-06
KIERS, ANTOINE GASTON MARIE
Executed: 2004-12-17
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization