Patent Assignment
Reel/Frame 016111/0374
Assignment of Assignor's Interest
Recorded: 2004-12-28
Pages: 3
Assignors
SHI, XUELONG
Executed: 2004-12-06
CHEN, JANG FUNG
Executed: 2004-12-03
LAIDIG, THOMAS
Executed: 2004-12-07
WAMPLER, KURT E.
Executed: 2004-12-07
VAN DEN BROEKE, DOUGLAS
Executed: 2004-12-03
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, 5500 AH VELDHOVER, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Performing Model Based Placement of Phase-Balanced Scattering Bars for Sub-Wavelength Optical Lithography
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Re-Record to Correct the Address of the Assignee, Previously Recorded on Reel 016111 Frame 0374.
Feb 8, 2006
From: SHI, XUELONG; CHEN, JANG FUNG; LAIDIG, THOMAS; WAMPLER, KURT E.
To: ASML MASKTOOLS B.V.
Reel/Frame 017246/0193 →
Assignment of Assignor's Interest
Feb 7, 2014
From: ASML MASKTOOLS B.V.
To: ASML NETHERLANDS B.V.
Reel/Frame 032170/0425 →