Patent Assignment
Reel/Frame 016148/0100
Assignment of Assignor's Interest
Recorded: 2005-01-10
Pages: 4
Assignors
KOSHIISHI, AKIRA
Executed: 2004-10-10
TANAKA, HIDEAKI
Executed: 2004-10-10
OKAYAMA, NOBUYUKI
Executed: 2004-10-10
MIYAGAWA, MASAAKI
Executed: 2004-10-10
MIZUKAMI, SHUNSUKE
Executed: 2004-10-10
SHIMIZU, WATARU
Executed: 2004-10-10
HIROSE, JUN
Executed: 2004-10-10
WAKAKI, TOSHIKATSU
Executed: 2004-10-10
MIWA, TOMONORI
Executed: 2004-10-10
OOYABU, JUN
Executed: 2004-10-10
HAYASHI, DAISUKE
Executed: 2004-10-10
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Focus Ring and Plasma Processing Apparatus