Patent Assignment
Reel/Frame 016157/0244
Assignment of Assignor's Interest
Recorded: 2005-01-10
Pages: 3
Assignor
WEISS, MARKUS
Executed: 2004-11-23
Assignee
CARL ZEISS SMT AG
CARL ZEISS STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Collector Unit with a Reflective Element for Illumination Systems with a Wavelength of Smaller Than 193 Nm
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.