Patent Assignment
Reel/Frame 016158/0254
Assignment of Assignor's Interest
Recorded: 2005-01-04
Pages: 3
Assignor
TOKITA, TOSHINOBU
Executed: 2004-12-22
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Exposure Apparatus and Device Manufacturing Method