Patent Assignment
Reel/Frame 016183/0483
Assignment of Assignor's Interest
Recorded: 2005-04-28
Pages: 3
Assignors
BOWERING, NORBERT R.
Executed: 2005-04-12
HANSSON, BJORN A. M.
Executed: 2005-04-18
BYKANOV, ALEXANDER N.
Executed: 2005-04-12
KHODYKIN, OLEH
Executed: 2005-04-12
ERSHOV, ALEXANDER I.
Executed: 2005-04-27
PARTLO, WILLIAM N.
Executed: 2005-04-26
Assignee
CYMER, INC.
LEGAL DEPT., MS/4-2C, 17075 THORNMINT COURT, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
Systems for Protecting Internal Components of an Euv Light Source from Plasma-Generated Debris
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.