Patent Assignment
Reel/Frame 016258/0990
Change of Name
Recorded: 2005-02-11
Pages: 5
Assignor
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Executed: 2002-08-27
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Optical Imaging System with Polarizer and a Crystalline-Quartz Plate for Use Therewith
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.