Patent Assignment
Reel/Frame 016286/0975
Assignment of Assignor's Interest
Recorded: 2005-02-18
Pages: 3
Assignors
ZAAL, KOEN JACOBUS JOHANNES MARIA
Executed: 2005-02-11
OTTENS, JOOST JEROEN
Executed: 2005-02-11
HOPMAN, JAN
Executed: 2005-01-27
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus and Device Manufacturing Method