Assignment of Assignor's Interest

Recorded: 2005-07-28 Pages: 3

Assignor

KUMAGAI, AKIRA

Executed: 2005-07-28

Assignee

ANELVA CORPORATION

8-1, YOTSUYA, 5-CHOME, FUCHU-SHI, TOKYO, 183-8508, JAPAN

Covered Property (1)

Substrate Processing Apparatus And Substrate Processing Method Using Such Substrate Processing Apparatus

Application: 11/161,293 →

Publication: US 2006/0027166

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.