Patent Assignment
Reel/Frame 016331/0367
Assignment of Assignor's Interest
Recorded: 2005-02-25
Pages: 2
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI-KANAGAWA 211-8668, JAPAN
Covered Property
(1)
Plasma Processing Apparatus, Semiconductor Manufacturing Apparatus and Electrostatic Chucking Unit Used Thereof
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.