Plasma processing apparatus, semiconductor manufacturing apparatus and electrostatic chucking unit used thereof
View Patent ↗A wiring member which becomes substantially symmetrical on the plane of an electrostatic chuck unit is connected to the tip end of an RF introduction rod between the RF introduction rod and the electrostatic chuck unit in order to make uniform generation of an electric field due to bias RF which becomes a cause of plasma damage. The connection point between the electrostatic chuck unit and the wiring member may be single or plural.
1. A plasma processing apparatus, comprising:
an electrostatic chuck having a conductive member that generates an electrostatic attraction for holding an object;
an RF bias-introducing rod connected to a source of RF power; and
a wiring member connecting said RF bias-introducing rod to said conductive member,
in plan view, said wiring member having plural linear connectors and plural curved connectors, each of said linear connectors having one end connected to a same end of said RF bias-introducing rod and being substantially linear-symmetrical with respect to a straight line passing through a center of said conductive member, each of said curved connectors being substantially centrosymmetrical with respect to the center of said conductive member and having two distal ends and being connected to an opposite end of a respective different one of said linear connectors, and
at least one of the distal ends of one of said curved connectors being connected to said conductive member.
2. The apparatus of claim 1 , wherein all of said plural linear connectors are connected to only one said RE bias-introducing rod.
3. The apparatus of claim 1 , wherein each of said plural curved connectors comprises a curved wire that is connected to the respective different one of said linear connectors between the distal ends of said curved wire, the distal ends being spaced apart on a periphery of said conductive member.
4. The apparatus of claim 1 , wherein only one of the distal ends of said plural curved connectors is connected to said conductive member.
5. The apparatus of claim 1 , wherein only one of the distal ends of each of said plural curved connectors is connected to said conductive member.
6. The apparatus of claim 1 , wherein, in plan view, each of said plural linear connectors includes a first straight portion that is connected to said same end of said RE bias-introducing rod and a second straight portion transverse to said first straight portion.