Patent Assignment
Reel/Frame 016367/0156
Assignment of Assignor's Interest
Recorded: 2005-03-08
Pages: 3
Assignor
HUANG, YONGZHANG
Executed: 2005-03-08
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
High Conductance Ion Source
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.