IP Library Assignment 016367/0156
Patent Assignment
Reel/Frame 016367/0156

Assignment of Assignor's Interest

Recorded: 2005-03-08 Pages: 3
Assignor
HUANG, YONGZHANG
Executed: 2005-03-08
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property (1)
High Conductance Ion Source
Patent: 7,488,958 →
Application: 11/074,435 →
Publication: US 2006/0219938
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Consent and License Agreement Apr 17, 2009
From: AXCELIS TECHNOLOGIES, INC.
To: SEN CORPORATION
Reel/Frame 022562/0758 →