Patent Assignment
Reel/Frame 016372/0120
Assignment of Assignor's Interest
Recorded: 2005-03-16
Pages: 3
Assignor
LAIDIG, THOMAS
Executed: 2005-03-07
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, VELDHOVEN, AH 5500, NETHERLANDS
Covered Property
(1)
Feature Optimization Using Enhanced Interference Mapping Lithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.