Patent Assignment
Reel/Frame 016380/0835
Assignment of Assignor's Interest
Recorded: 2005-03-14
Pages: 4
Assignors
NOMURA, SHUJI
Executed: 2005-03-11
MIYOSHI, AYUMU
Executed: 2005-03-11
MIKI, HIROSHI
Executed: 2005-03-11
Assignee
ANELVA CORPORATION
8-1, YOTSUYA 5-CHOME, FUCHU-SHI, TOKYO, JAPAN
Covered Property
(1)
Double-Layer Shutter Control Method of Multi-Sputtering System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.