Patent Assignment
Reel/Frame 016459/0620
Assignment of Assignor's Interest
Recorded: 2005-04-08
Pages: 3
Assignor
MORITA, OSAMU
Executed: 2005-04-01
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU,, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma Processing Apparatus, Process Vessel for Plasma Processing Apparatus and Dielectric Plate for Plasma Processing Apparatus