Plasma processing apparatus, process vessel for plasma processing apparatus and dielectric plate for plasma processing apparatus
According to the present invention, with an object of minimizing damage to a dielectric plate and a metal vessel and improving efficiency of plasma processing, a resin layer is disposed in an area where the dielectric plate and the process vessel face each other. This can reduce particles and damage ascribable to a difference in thermal expansion coefficient between the dielectric plate and the metal process vessel. Moreover, the occurrence of local discharge in an electric field boundary such as an edge portion of the dielectric plate is inhibited, resulting in improved efficiency of plasma processing such as film deposition of an oxide film.
1. A plasma processing apparatus applying plasma processing to a semiconductor substrate, comprising:
a process vessel housing the semiconductor substrate to be processed;
an electromagnetic wave supply part supplying an electromagnetic wave for generating plasma in a process space of said process vessel;
a dielectric plate closing an opening formed in an upper portion of said process vessel;
a support part on an inner wall side of the process vessel protruding into an inner side of the process vessel to support an outer peripheral portion of said dielectric plate on an upper face of said support part;
a sealing material disposed between said dielectric plate and said support part, wherein the sealing part is located in a first groove formed in the support part;
and
a resin layer interposed in an area on an inner side of the sealing material or in an area on an outer side of the sealing material, and between said dielectric plate and said support part,
wherein an area in which the upper face of said support part on an outer side of the sealing material and the dielectric plate face each other, and an area in which the inner side of the process vessel and the outer peripheral portion of the dielectric plate face each other, are contacted through said resin layer,
wherein a second groove for absorbing thermal expansion is formed in the support part in an area having the resin layer, the groove being disposed in a corner portion between a side face of the support part and a base portion of the support part, or in an area of the side face of the support part being immediately adjacent to said corner portion or in an area of the base portion of the support part being immediately adjacent to said corner portion.
2. The plasma processing apparatus as set forth in claim 1 ,
wherein said resin layer is formed on said dielectric plate.
3. The plasma processing apparatus as set forth in claim 1 ,
wherein said resin layer has a thickness of 40 μm to 100 μm.
4. The plasma processing apparatus as set forth in claim 1 ,
wherein said resin layer is disposed both in an area on an inner side of the sealing material and in an area on an outer side of the sealing material.
5. The dielectric plate of claim 1 which is used in a plasma processing apparatus applying predetermined processing to a semiconductor substrate by plasma excited in a process vessel and through which an electromagnetic wave to excite the plasma transmits when the electromagnetic wave is introduced,
wherein a resin layer is disposed on both an outer peripheral portion of said dielectric plate and support face supported on said process vessel of said dielectric plate, and
wherein the resin layer has a thickness of 40 μm to 100 μm.
6. The dielectric plate as set forth in claim 5 ,
said dielectric plate being made of one of quartz, alumina, and aluminum nitride.
7. The dielectric plate as set forth in claim 5 ,
wherein said electromagnetic wave is a microwave.
8. The plasma processing apparatus as set forth in claim 1 ,
wherein said electromagnetic wave is a microwave.