Patent Assignment
Reel/Frame 016499/0491
Assignment of Assignor's Interest
Recorded: 2005-04-27
Pages: 3
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, VELDHOVEN, AH 5500, NETHERLANDS
Covered Property
(1)
Method of Predicting and Minimizing Model Opc Deviation Due to Mix/Match of Exposure Tools Using a Calibrated Eigen Decomposition Model
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.