Patent Assignment
Reel/Frame 016726/0291
Assignment of Assignor's Interest
Recorded: 2005-03-14
Pages: 2
Assignor
TAKAHASHI, NOBUYUKI
Executed: 2004-10-08
Assignee
ANELVA CORPORATION
5-8-1 YOTSUYA, TOKYO 183-8508, JAPAN
Covered Property
(1)
Method of operating substrate processing device
Application:
10/505,544 →
Publication:
US 2005/0255717
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.