Patent Assignment
Reel/Frame 016751/0517
Assignment of Assignor's Interest
Recorded: 2005-07-01
Pages: 2
Assignor
FERRARA, JOSEPH
Executed: 2005-06-30
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Method and Apparatus for Scanning a Workpiece in a Vacuum Chamber of an Ion Beam Implanter
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.