Patent Assignment
Reel/Frame 016753/0593
Assignment of Assignor's Interest
Recorded: 2005-06-06
Pages: 3
Assignor
MATSUDA, TSUKASA
Executed: 2005-05-05
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma Enhanced Atomic Layer Deposition System and Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.