Assignment of Assignor's Interest

Recorded: 2005-07-06 Pages: 3

Assignor

MATSUDA, TSUKASA

Executed: 2005-05-05

Assignee

TOKYO ELECTRON LIMITED

3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN

Covered Property (1)

Plasma Enhanced Atomic Layer Deposition System and Method

Patent: 8,486,845 →

Application: 11/084,024 →

Publication: US 2006/0211224

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.