Patent Assignment
Reel/Frame 016781/0007
Assignment of Assignor's Interest
Recorded: 2005-07-14
Pages: 2
Assignors
NISHIYAMA, HIDETOSHI
Executed: 2005-07-04
SHIBATA, YUKIHIRO
Executed: 2005-07-04
MAEDA, SHUNJI
Executed: 2005-07-04
YOSHIDA, MINORU
Executed: 2005-07-04
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Apparatus for Inspecting Pattern Defects