Patent Assignment
Reel/Frame 016810/0775
Assignment of Assignor's Interest
Recorded: 2005-07-25
Pages: 5
Assignors
KELLERMAN, PETER L.
Executed: 2005-04-05
BENVENISTE, VICTOR M.
Executed: 2005-04-05
SAADATMAND, KOUROSH
Executed: 2005-04-05
ASDIGHA, MEHRAN
Executed: 2005-04-05
BROWN, DOUGLAS A.
Executed: 2005-04-08
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Wafer Scanning System with Reciprocating Rotary Motion Utilizing Springs and Counterweights
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.