Patent Assignment
Reel/Frame 016847/0863
Assignment of Assignor's Interest
Recorded: 2005-09-30
Pages: 3
Assignor
TERAI, HIROAKI
Executed: 2005-08-09
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI, KANAGAWA, 211-8668, JAPAN
Covered Property
(1)
Apparatus and Method for Conditioning and Monitoring Media Used for Chemical-Mechanical Planarization