Patent Assignment
Reel/Frame 016890/0531
Corrective Assignment Correction of Assignment Recorded on August 16, 2005 at Reel 016640 Frame 0557
Recorded: 2005-10-17
Pages: 4
Assignee
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC)
KAPELDREEF 75, LEUVEN, 3001, BELGIUM
Covered Property
(1)
Method and Apparatus for Immersion Lithography
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.