Patent Assignment
Reel/Frame 016918/0061
Assignment of Assignor's Interest
Recorded: 2005-10-20
Pages: 4
Assignee
LEICA MICROSYSTEMS LITHOGRAPHY GMBH
GOSCHWITZER STRASSE 25, JENA, D-07745, GERMANY
Covered Property
(1)
Process for Controlling the Proximity Effect Correction
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.