Patent Assignment
Reel/Frame 017017/0513
Assignment of Assignor's Interest
Recorded: 2005-11-14
Pages: 7
Assignors
BECKNELL, ALAN F.
Executed: 2005-10-10
HAMMAR, PHILIP
Executed: 2005-11-09
FERRIS, DAVID
Executed: 2005-11-05
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Apparatus and Plasma Ashing Process for Increasing Photoresist Removal Rate
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Assignment of Assignor's Interest
Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement
Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →