Assignment of Assignor's Interest

Recorded: 2006-01-17 Pages: 6

Assignors

SHUMLAK, URI

Executed: 2005-12-15

GOLINGO, RAYMOND

Executed: 2005-12-19

NELSON, BRIAN A.

Executed: 2005-12-22

Assignee

UNIVERSITY OF WASHINGTON

4311 - 11TH AVENUE NE, SUITE 500, SEATTLE, WASHINGTON, 98105

Covered Property (1)

Plasma-Based Euv Light Source

Patent: 7,372,059 →

Application: 11/252,021 →

Publication: US 2007/0085042

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.