Patent Assignment
Reel/Frame 017030/0489
Assignment of Assignor's Interest
Recorded: 2005-09-26
Pages: 4
Assignors
EURLINGS, MARKUS
Executed: 2005-09-26
MULDER, MELCHIOR
Executed: 2005-09-26
LAIDIG, THOMAS
Executed: 2005-06-20
HOLLERBACH, UWE
Executed: 2005-06-20
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, VELDHOVEN, AH 5500, NETHERLANDS
Covered Property
(1)
Apparatus, Method and Program Product for Suppressing Waviness of Features to Be Printed Using Photolithographic Systems
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.