Patent Assignment
Reel/Frame 017054/0908
Assignment of Assignor's Interest
Recorded: 2005-09-30
Pages: 3
Assignor
GUMPHER, JOHN
Executed: 2005-09-29
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method of Forming a Silicon Oxynitride Film with Tensile Stress