IP Library Assignment 017084/0211
Patent Assignment
Reel/Frame 017084/0211

Assignment of Assignor's Interest

Recorded: 2005-10-11 Pages: 2
Assignors
SHIBATA, TSUTOMU
Executed: 2005-10-11
TANABE, HIROYUKI
Executed: 2005-10-11
Assignee
NGK SPARK PLUG CO., LTD.
14-18, TAKATSUJI-CHO, MIZUHO-KU, NAGOYA-AICHI, JAPAN
Covered Property (1)
Diffuser, Wavefront Source, Wavefront Sensor and Projection Exposure Apparatus
Patent: 7,388,696 →
Application: 11/246,633 →
Publication: US 2006/0109533
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Jan 26, 2006
From: SCHRIEVER, MARTIN; HAIDNER, HELMUT
To: CARL ZEISS SMT AG
Reel/Frame 017499/0193 →
A Modifying Conversion Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →