Patent Assignment
Reel/Frame 017499/0193
Assignment of Assignor's Interest
Recorded: 2006-01-26
Pages: 2
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Diffuser, Wavefront Source, Wavefront Sensor and Projection Exposure Apparatus
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.