IP Library Assignment 017499/0193
Patent Assignment
Reel/Frame 017499/0193

Assignment of Assignor's Interest

Recorded: 2006-01-26 Pages: 2
Assignors
SCHRIEVER, MARTIN
Executed: 2006-01-10
HAIDNER, HELMUT
Executed: 2006-01-12
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property (1)
Diffuser, Wavefront Source, Wavefront Sensor and Projection Exposure Apparatus
Patent: 7,388,696 →
Application: 11/246,633 →
Publication: US 2006/0109533
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Oct 11, 2005
From: SHIBATA, TSUTOMU; TANABE, HIROYUKI
To: NGK SPARK PLUG CO., LTD.
Reel/Frame 017084/0211 →
A Modifying Conversion Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →