Patent Assignment
Reel/Frame 017117/0764
Assignment of Assignor's Interest
Recorded: 2005-10-19
Pages: 2
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI, KANAGAWA 211-8668, JAPAN
Covered Property
(1)
Etching apparatus and etching method
Application:
11/252,805 →
Publication:
US 2006/0086461
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.