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App. No. 11/252,805 · Confirmation No. 9645

Etching apparatus and etching method

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2014-08-26 ABN Abandonment 2 View
2014-06-05 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2014-05-21 CTAV Advisory Action (PTOL-303) 3 View
2014-04-30 A.NE Response After Final Action 1 View
2014-04-30 CLM Claims 7 View
2014-04-30 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2014-04-30 A.NE.AFCP After Final Consideration Program Request 2 View
2014-04-30 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-04-30 WFEE Fee Worksheet (SB06) 1 View
2014-01-30 CTFR Final Rejection 12 View
2014-01-30 892 List of references cited by examiner 1 View
2014-01-30 1449 List of References cited by applicant and considered by examiner 3 View
2014-01-30 SRNT Examiner's search strategy and results 32 View
2014-01-30 1449 List of References cited by applicant and considered by examiner 1 View
2014-01-30 1449 List of References cited by applicant and considered by examiner 2 View
2014-01-30 SRFW Search information including classification, databases and other search related notes 1 View
2013-12-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2013-12-26 CLM Claims 14 View
2013-12-26 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2013-12-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-12-26 WFEE Fee Worksheet (SB06) 1 View
2013-09-26 CTNF Non-Final Rejection 75 View
2013-09-26 892 List of references cited by examiner 1 View
2013-09-26 FOR Foreign Reference 6 View
2013-09-26 1449 List of References cited by applicant and considered by examiner 2 View
2013-09-26 1449 List of References cited by applicant and considered by examiner 1 View
2013-09-26 1449 List of References cited by applicant and considered by examiner 3 View
2013-09-26 SRNT Examiner's search strategy and results 28 View
2013-09-26 SRFW Search information including classification, databases and other search related notes 1 View
2012-03-15 RCEX Request for Continued Examination (RCE) 3 View
2012-03-15 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2012-03-15 CLM Claims 13 View
2012-03-15 REM Applicant Arguments/Remarks Made in an Amendment 25 View
2012-03-15 WFEE Fee Worksheet (SB06) 2 View
2012-03-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-03-15 WFEE Fee Worksheet (SB06) 1 View
2011-12-15 CTFR Final Rejection 47 View
2011-12-15 1449 List of References cited by applicant and considered by examiner 2 View
2011-12-15 1449 List of References cited by applicant and considered by examiner 1 View
2011-12-15 SRNT Examiner's search strategy and results 11 View
2011-12-15 SRFW Search information including classification, databases and other search related notes 1 View
2011-12-15 1449 List of References cited by applicant and considered by examiner 3 View
2011-11-28 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2011-11-28 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2011-11-28 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-09-01 CTNF Non-Final Rejection 45 View
2011-09-01 892 List of references cited by examiner 1 View
2011-09-01 SRNT Examiner's search strategy and results 10 View
2011-09-01 1449 List of References cited by applicant and considered by examiner 3 View
2011-09-01 1449 List of References cited by applicant and considered by examiner 2 View
2011-09-01 SRFW Search information including classification, databases and other search related notes 1 View
2011-09-01 1449 List of References cited by applicant and considered by examiner 1 View
2011-07-07 RCEX Request for Continued Examination (RCE) 3 View
2011-07-07 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2011-07-07 CLM Claims 8 View
2011-07-07 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2011-07-07 WFEE Fee Worksheet (SB06) 2 View
2011-07-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-07-07 WFEE Fee Worksheet (SB06) 1 View
2011-06-11 DISQ Terminal Disclaimer review decision 1 View
2011-04-14 CTFR Final Rejection 22 View
2011-04-14 892 List of references cited by examiner 1 View
2011-04-14 BIB Bibliographic Data Sheet 1 View
2011-04-14 SRNT Examiner's search strategy and results 9 View
2011-04-14 SRFW Search information including classification, databases and other search related notes 1 View
2011-04-14 1449 List of References cited by applicant and considered by examiner 1 View
2011-04-14 1449 List of References cited by applicant and considered by examiner 3 View
2011-04-14 1449 List of References cited by applicant and considered by examiner 2 View
2011-02-25 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2011-02-25 SPEC Specification 1 View
2011-02-25 CLM Claims 8 View
2011-02-25 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2011-02-25 DIST Terminal Disclaimer Filed 2 View
2011-02-25 AF/D Affidavit-submitted prior to Mar 15, 2013 2 View
2011-02-25 AF/D Affidavit-submitted prior to Mar 15, 2013 2 View
2011-02-25 WFEE Fee Worksheet (SB06) 2 View
2011-02-25 N417 Electronic Filing System Acknowledgment Receipt 3 View
2011-02-25 WFEE Fee Worksheet (SB06) 1 View
2010-11-26 CTNF Non-Final Rejection 11 View
2010-11-26 892 List of references cited by examiner 1 View
2010-11-26 SRFW Search information including classification, databases and other search related notes 1 View
2010-11-26 BIB Bibliographic Data Sheet 1 View
2010-11-26 SRNT Examiner's search strategy and results 8 View
2010-11-26 1449 List of References cited by applicant and considered by examiner 3 View
2010-11-26 1449 List of References cited by applicant and considered by examiner 2 View
2010-11-26 EXIN Examiner Interview Summary Record (PTOL - 413) 4 View
2010-07-26 RCEX Request for Continued Examination (RCE) 3 View
2010-07-26 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2010-07-26 CLM Claims 8 View
2010-07-26 REM Applicant Arguments/Remarks Made in an Amendment 16 View
2010-07-26 WFEE Fee Worksheet (SB06) 2 View
2010-07-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-07-26 WFEE Fee Worksheet (SB06) 1 View
2010-07-21 CTAV Advisory Action (PTOL-303) 3 View
2010-06-25 A.NE Response After Final Action 1 View
2010-06-25 REM Applicant Arguments/Remarks Made in an Amendment 14 View
2010-06-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-03-25 CTFR Final Rejection 36 View
2010-03-25 892 List of references cited by examiner 1 View
2010-03-25 SRFW Search information including classification, databases and other search related notes 1 View
2010-03-25 BIB Bibliographic Data Sheet 1 View
2010-03-25 SRNT Examiner's search strategy and results 7 View
2010-03-25 1449 List of References cited by applicant and considered by examiner 3 View
2010-03-25 1449 List of References cited by applicant and considered by examiner 2 View
2010-01-05 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2010-01-05 CLM Claims 8 View
2010-01-05 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2010-01-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-01-05 WFEE Fee Worksheet (SB06) 1 View
2009-10-13 CTNF Non-Final Rejection 18 View
2009-10-13 892 List of references cited by examiner 1 View
2009-10-13 SRFW Search information including classification, databases and other search related notes 1 View
2009-10-13 SRNT Examiner's search strategy and results 4 View
2009-10-13 1449 List of References cited by applicant and considered by examiner 2 View
2009-10-13 1449 List of References cited by applicant and considered by examiner 3 View
2009-09-22 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2009-07-01 ELC. Response to Election / Restriction Filed 1 View
2009-07-01 CLM Claims 9 View
2009-07-01 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2009-07-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-07-01 WFEE Fee Worksheet (SB06) 1 View
2009-06-01 CTRS Requirement for Restriction/Election 6 View
2009-05-22 TRAN.LET Transmittal Letter 2 View
2009-05-22 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2009-05-22 FOR Foreign Reference 18 View
2009-05-22 FOR Foreign Reference 7 View
2009-05-22 FOR Foreign Reference 10 View
2009-05-22 FOR Foreign Reference 6 View
2009-05-22 N417 Electronic Filing System Acknowledgment Receipt 3 View
2006-12-28 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2006-12-28 FOR Foreign Reference 13 View
2006-12-28 FOR Foreign Reference 16 View
2005-10-19 TRNA Transmittal of New Application 2 View
2005-10-19 SPEC Specification 30 View
2005-10-19 CLM Claims 5 View
2005-10-19 ABST Abstract 1 View
2005-10-19 DRW Drawings-only black and white line drawings 21 View
2005-10-19 OATH Oath or Declaration filed 2 View
2005-10-19 WFEE Fee Worksheet (SB06) 1 View
2005-10-19 WFEE Fee Worksheet (SB06) 1 View
2005-10-19 ADS Application Data Sheet 3 View
2005-10-19 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-10-19 FOR Foreign Reference 5 View
2005-10-19 FOR Foreign Reference 10 View
2005-10-19 FOR Foreign Reference 7 View
2005-10-19 FRPR Certified Copy of Foreign Priority Application 39 View
2005-10-19 136A Authorization for Extension of Time all replies 2 View
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Quick Facts
App. No.
11/252,805
Filed
2005-10-19
Pub. No.
US20060086461A1
Art Unit
1716