Patent Assignment
Reel/Frame 017138/0749
Assignment of Assignor's Interest
Recorded: 2005-10-24
Pages: 3
Assignor
ISHIZAKA, TADAHIRO
Executed: 2005-08-31
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method of Preparing a Film Layer-by-Layer Using Plasma Enhanced Atomic Layer Deposition
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.