Patent Assignment
Reel/Frame 017646/0202
Corrective Assignment to Correct the Assignee's Address, Previously Recorded at Reel 017138 Frame 0749.
Recorded: 2006-03-08
Pages: 4
Assignor
ISHIZAKA, TADAHIRO
Executed: 2005-08-31
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method of Preparing a Film Layer-by-Layer Using Plasma Enhanced Atomic Layer Deposition
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.