Patent Assignment
Reel/Frame 017234/0434
Assignment of Assignor's Interest
Recorded: 2005-11-10
Pages: 2
Assignors
KANEYAMA, KOJI
Executed: 2005-10-21
HISAI, AKIHIRO
Executed: 2005-10-21
ASANO, TORU
Executed: 2005-11-09
KOBAYASHI, HIROSHI
Executed: 2005-10-27
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.