Patent Assignment
Reel/Frame 017407/0330
Assignment of Assignor's Interest
Recorded: 2005-12-27
Pages: 3
Assignors
WEGMANN, ULRICH
Executed: 2005-11-15
KAMENOV, VLADIMIR
Executed: 2005-11-15
MUELDERS, THOMAS
Executed: 2005-12-03
GRUNER, TORALF
Executed: 2005-11-21
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Method for Improving the Imaging Properties of a Projection Objective for a Microlithographic Projection Exposure Apparatus
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.