Patent Assignment
Reel/Frame 021661/0697
Assignment of Assignor's Interest
Recorded: 2008-10-07
Pages: 2
Assignor
MENGEL, MARKUS
Executed: 2008-04-14
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Improving the Imaging Properties of a Projection Objective for a Microlithographic Projection Exposure Apparatus
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.