Assignment of Assignor's Interest

Recorded: 2005-12-24 Pages: 2

Assignors

HASEGAWA, KOJI

Executed: 2005-11-15

TANAKA, MASATO

Executed: 2005-11-21

HIGUCHI, AYUMI

Executed: 2005-11-15

ARAI, KENICHIRO

Executed: 2005-11-15

Assignee

DAINIPPON SCREN MFG. CO., LTD.

1-1 TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Method

Patent: 7,392,814 →

Application: 11/317,971 →

Publication: US 2006/0137719

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.