Patent Assignment
Reel/Frame 017417/0642
Assignment of Assignor's Interest
Recorded: 2005-12-28
Pages: 3
Assignor
LEE, DONG JIN
Executed: 2005-12-23
Assignee
DONGBU ANAM SEMICONDUCTOR INC.
891-10, DAECHI-DONG, GANGNAM-GU, SEOUL, 135-280, KOREA, REPUBLIC OF
Covered Property
(1)
Baking apparatus used in photolithography process, and method for controlling critical dimension of photoresist patterns using the same
Application:
11/318,508 →
Publication:
US 2006/0154479
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.